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Tohoku Univ. Technology:Magnetic sensor and its measurement circuit:T23-005

Highly sensitive and wide range magnetic sensors

Magnetic sensors with wide dynamic range and high sensitivity have been developed. Various types of sensors, such as SQUID magnetometers and Hall sensors, have been used. Cantilever-type magnetic sensors using mechanical resonant frequency have especially attracted attention because of their low power consumption, small size, and potential for wide dynamic range. However, while they exhibit high sensitivity near the resonance frequency, there is an issue that sensitivity and resolution are not sufficient for magnetic fields below the resonance frequency including DC magnetic fields.  The present invention relates to a cantilever-type magnetic sensor. The sensitivity and bandwidth can be adjusted electrically by introducing a magnetic excitation component. This enables high sensitivity and wide-band magnetic field detection. 【 For those who see this document 】  Since it is a seed for unpublished patents, it is possible to disclose the description after the conclusion of the IP contract.

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